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Reference
20120001_0077
Vue de dessus, en microscopie électronique à balayage (MEB), d'un champ de micropiliers de silicium
Vue de dessus, en microscopie électronique à balayage (MEB), d'un champ de micropiliers de silicium cylindriques, obtenus en usinant un substrat de silicium par un procédé de gravure profonde.
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