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Reference
20120001_0076
Vue de dessus, en microscopie électronique à balayage (MEB), d'un micropilier de silicium cylindriqu
Vue de dessus, en microscopie électronique à balayage (MEB), d'un micropilier de silicium cylindrique, obtenu en usinant un substrat de silicium par un procédé de gravure profonde.
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