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© Cyril FRESILLON / UMPhy CNRS-Thales / CNRS Images



Système de transfert sous vide d’échantillons entre les différentes enceintes d'un cluster

Sample vacuum transfer system between the various enclosures of a functional oxide growth cluster. This cluster consists of 2 pulsed laser ablation (PLD - pulsed laser deposition) assemblies, a cathode sputtering assembly and an XPS (X-ray photoelectron spectroscopy) system for performing in-situ analyses. In PLD, a pulsed laser ablates a target consisting of material that the research scientists wish to deposit in thin layers. The atoms contained in the plasma thus created are deposited on a substrate and form a thin layer.

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