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Reference
20150001_0539
Réacteur de dépôt ALD
Réacteur de dépôt ALD (Atomic layer deposition) utilisé pour le dépôt de couches minces d'alumine sur des cellules photovoltaïques en silicium cristallin. L'alumine permet de passiver la surface des cellules photovoltaïques, c'est-à-dire de ralentir sa vitesse de corrosion, et d'améliorer ainsi leur rendement de conversion.
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