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© Cyril FRESILLON / UMPhy CNRS-Thales / CNRS Images
Contrôle des paramètres pendant la phase de dépôt dans une chambre d’évaporation thermique
Max. size41.72 x 27.77 cm / 300 dpi
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Checking of parameters during the deposition phase in a thermal evaporation chamber used for the production of thin layers under ultra-high vacuum. This chamber is intended for the deposition of magnetic nanostructures for spintronics and is part of an experimental vacuum unit, also comprising a treatment chamber and a cathode sputtering chamber.
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